Wafer pre-cleaning and final cleaning
Modular cleaning units made by Elma (pre-cleaning and final cleaning) with integrated automatic wet separation form a complete cleaning installation with a throughput of up to 3,600 wafers/hour. Concerning quality and flexibility, these cleaning installations provide you with all the advantages of a batch-related cleaning system. (Simultaneous operation of the installation with two different formats is possible.)
Elma STC robot installations
Photovoltaics prospect